| Stage Size | 370mm x 470 mm~ |
|
| Measurement Range | 1000＆#8491;~ 2.5＆#13211; at Sub-micron size |
|
| Spot size | ~ 0.2＆#13211; x 0.2＆#13211; |
|
| Measurement Speed | 14sec./Area |
|
| Application Areas | Half-tone Measurement
All Capability of ST6000/7000 |
|
| Function | All Capabilities of ST6000
Fine Pattern Measurement
Auto Focusing
CCD Camera
Pattern Recognition
CIM Communication |
